Conference paper
Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
In this paper we solve the decision problem of a certain second- order mathematical theory and apply it to obtain a large number of decidability results. The method of solution involves the development of a theory of automata on infinite trees—a chapter in combinatorial mathematics which may be of independent interest.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
Michael Ray, Yves C. Martin
Proceedings of SPIE - The International Society for Optical Engineering
Shu Tezuka
WSC 1991
Arnon Amir, Michael Lindenbaum
IEEE Transactions on Pattern Analysis and Machine Intelligence