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Modeling polarization for Hyper-NA lithography tools and masks
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Simulations carried out for a very shallow crucible indicate that counterrotation of the crucible reduces convection somewhat, but that isorotation suppresses it almost completely. This may have some implications about the use of a baffle plate in deep-crucible Czochralski growth. © 1983.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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