Conference paper
Materials engineering for phase change random access memory
Simone Raoux, Huai-Yu Cheng, et al.
NVMTS 2011
The crystallization of amorphous Ge2Sb2Te5 (GST) doped with nitrogen is studied with pulsed laser heating. The crystallization time of sputter-deposited films is increased by doping by as much as 100× for nitrogen concentrations of the order of 12 at. % in as-deposited amorphous films. Suppression of the formation of critical crystal nuclei is found to be responsible. The crystallization of melt-quenched amorphous material is also slowed by doping but less dramatically. © 2009 American Institute of Physics.
Simone Raoux, Huai-Yu Cheng, et al.
NVMTS 2011
Geoffrey W. Burr, Robert M. Shelby, et al.
Advances in Physics: X
Simone Raoux, Martin Salinga, et al.
Journal of Applied Physics
S. Sidler, Irem Boybat, et al.
ESSDERC 2016