Magali Putero, Marie-Vanessa Coulet, et al.
Applied Physics Letters
The crystallization of amorphous Ge2Sb2Te5 (GST) doped with nitrogen is studied with pulsed laser heating. The crystallization time of sputter-deposited films is increased by doping by as much as 100× for nitrogen concentrations of the order of 12 at. % in as-deposited amorphous films. Suppression of the formation of critical crystal nuclei is found to be responsible. The crystallization of melt-quenched amorphous material is also slowed by doping but less dramatically. © 2009 American Institute of Physics.
Magali Putero, Marie-Vanessa Coulet, et al.
Applied Physics Letters
Robert M. Shelby
IPR 1992
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VLSI Technology 2019
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Chemistry of Materials