Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
We report here the synthesis and characterization of poly(amic ethyl ester) oligomers functionalized with trimethoxysilyl end-groups. The oligomers were prepared via the condensation of 1,1-bis(4-aminophenyl)-1-phenyl-2,2,2-trifluoroethane, diethyldichloromellitate and p-aminophenyltrimethoxysilane. The p-aminophenyltrimethoxysilane was used to control both molecular weight and end-group functionality. These oligomers were thermally cured to form crosslinked networks. The resulting networks possessed Tg in excess of 450°C and thermal decomposition temperatures in the proximity of 500°C. The formation of networks was confirmed by swelling studies. These oligomers offer an attractive processing alternative as low viscosity precursors to crosslinked polyimide networks. © 1997 Elsevier Science Ltd.
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Sharee J. McNab, Richard J. Blaikie
Materials Research Society Symposium - Proceedings
K.A. Chao
Physical Review B