Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
No abstract available.
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
Ming L. Yu
Physical Review B
Lawrence Suchow, Norman R. Stemple
JES
A. Krol, C.J. Sher, et al.
Surface Science