Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
Many planning methods are based on mathematical modeling. A multitude of computer aids covers different facets of the planning activity: data management, linear programming, statistical analysis, graphics, and word processing. However, the diversity and complexity of the available software inhibit the widespread use of computers for planning. The integrated Computer-Aided Modeling and Planning (CAMP) system offers a simple and coherent tool for the planner. A Data Definition Language provides the means for building data banks; a Model Definition Language provides the means for defining mathematical models featuring abstract linear programming, advanced array arithmetics, and assertions; a Picture Definition Language facilitates formation of tables and diagrams; a Text Definition Language combines word processing with illustrations of modeling results. The man-machine interface is based on interactive panels for controlling the planning process and on a command language for analyzing modeling results. A multilingual capability allows selection of the national language for interfacing with the system. The architecture of CAMP is presented, and its design, implementation, and use in regional planning are discussed. © 1986, ACM. All rights reserved.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
Sonia Cafieri, Jon Lee, et al.
Journal of Global Optimization
David L. Shealy, John A. Hoffnagle
SPIE Optical Engineering + Applications 2007
Amir Ali Ahmadi, Raphaël M. Jungers, et al.
SICON