Andrew J. Merriam, Donald S. Bethune, et al.
SPIE Advanced Lithography 2007
No abstract available.
Andrew J. Merriam, Donald S. Bethune, et al.
SPIE Advanced Lithography 2007
Fred Moshary, Nancy H. Chen, et al.
Physical Review Letters
Rohit S. Shenoy, Geoffrey W. Burr, et al.
Semiconductor Science and Technology
Donald S. Bethune, Charles T. Rettner, et al.
IQEC 1984