L. Gignac, S.H. Boettcher, et al.
M&M 2006
Paper
Backscattered electron imaging in the scanning electron microscope: The use of either: (A) high incident energy or (b) an array detector
Abstract
No abstract available.
Related
R.F. Liu, C.-K. Hu, et al.
Journal of Applied Physics
C.-K. Hu, L. Gignac, et al.
Microelectronics Reliability
C.-K. Hu, L. Gignac, et al.
JES