Ranulfo Allen, John Baglin, et al.
J. Photopolym. Sci. Tech.
Paper
Atomic layer deposition of metal and nitride thin films: Current research efforts and applications for semiconductor device processing
Abstract
No abstract available.
Related
Revanth Kodoru, Atanu Saha, et al.
arXiv
J. Paraszczak, J.M. Shaw, et al.
Micro and Nano Engineering
C.M. Brown, L. Cristofolini, et al.
Chemistry of Materials