Conference paper
Application of atomic-force microscopy to phase-shift masks
A.P. Ghosh, D.B. Dove, et al.
Microlithography 1992
The Kelvin probe force microscope, introduced some years ago, has opened up several avenues of investigation. In this letter, we demonstrate that the technique is capable of distinguishing constituents of a metal alloy through their work-function differences. The intermetallics in the alloy are clearly resolved. We discuss the basic principles of the measurement technique and present our results on aluminum/copper surfaces. The limits of the technique are also discussed. © 1999 American Institute of Physics.
A.P. Ghosh, D.B. Dove, et al.
Microlithography 1992
Y. Vlasov, E. Dulkeith, et al.
FiO 2005
R.S. Shenoy, K. Gopalakrishnan, et al.
VLSI Technology 2006
P.C.D. Hobbs, H.K. Wickramasinghe
Proceedings of SPIE 1989