A. Gupta, R. Gross, et al.
SPIE Advances in Semiconductors and Superconductors 1990
No abstract available.
A. Gupta, R. Gross, et al.
SPIE Advances in Semiconductors and Superconductors 1990
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
A. Reisman, M. Berkenblit, et al.
JES
K.A. Chao
Physical Review B