Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Recent optical-absorption experiments on rare-gas atoms bonded to metals dramatically segregate various rare-gas metal systems into two classes. Cunningham, Greenlaw, and Flynn have hypothesized that these two classes are characterized by the presence or absence of charge transfer from the (excited) rare-gas atom to the metal, and that such charge transfer is controlled by the sign of the difference -I*, where is the metal work function and I* is the energy required to ionize the rare-gas atom in its lowest excited state. Flynn and Chen have, in addition, collected data describing the dipole moments of adsorbed Xe; these also suggest a dramatic dependence on the quantity -I*. As a test of this hypothesis, we have measured the dipole moment of Xe adsorbed on a low-work-function substrate [Gd(0001), with =3.30.1 eV for the clean surface]. The central new result is that both the Gd measurement and a variety of existing experimental data are inconsistent with the interpretation emphasizing -I*. New calculations using the atom-on-jellium model are also introduced to supplement the discussion. Our analysis suggests that the behavior seen in the optical-absorption measurements could represent a physical effect even more unusual than the charge-transfer instability proposed by Flynn et al. © 1982 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
J. Tersoff
Applied Surface Science
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
I.K. Pour, D.J. Krajnovich, et al.
SPIE Optical Materials for High Average Power Lasers 1992