Heinz-Peter Schuchmann, Clemens Von Sonntag, et al.
Journal of Photochemistry and Photobiology, A: Chemistry
When pulsed, ultraviolet laser radiation falls on the surface of an organic polymer or biological tissue, the material at the surface is spontaneously etched away to a depth of 0.1 to several micrometers. In the process, the depth of etching is controlled by the width of the pulse and the fluence of the laser, and there is no detectable thermal damage to the substrate. The material that is removed by etching consists of products ranging from atoms to small fragments of the polymer. They are ejected at supersonic velocities. This dry photoetching technique is useful in patterning polymer films. It is also under serious investigation in several areas in surgery.
Heinz-Peter Schuchmann, Clemens Von Sonntag, et al.
Journal of Photochemistry and Photobiology, A: Chemistry
R.F. Dreyfus, Roger Kelly, et al.
Proceedings of SPIE 1989
R. Srinivasan
The Journal of Physical Chemistry
R. Srinivasan, Sylvain Lazare
Polymer