A Method for the Synthesis of BI3 for Use as a Dopant Source

Paper

01 Jan 1970

A Method for the Synthesis of BI₃ for Use as a Dopant Source

No abstract available.

Paper

Heinz Schmid, Hans Biebuyck, et al.

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Paper

K.N. Tu

Materials Science and Engineering: A

Paper

A. Reisman, M. Berkenblit, et al.

JES

Paper

R.J. Gambino, N.R. Stemple, et al.

Journal of Physics and Chemistry of Solids