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PaperSelf-aligned 3D shadow mask technique for patterning deeply recessed surfaces of micro-electro-mechanical systems devicesJ. Brugger, C. Andreoli, et al.Sensors and Actuators, A: Physical
Conference paperCompact copper/epoxy-based electromagnetic scanner for scanning probe applicationsH. Rothuizen, M. Despont, et al.MEMS 2002
Paper"Millipede" - An AFM data storage system at the frontier of nanotribologyU. Dürig, G. Cross, et al.Tribology Letters
