Naigang Wang, Bruce Doris, et al.
IEDM 2016
Paper
A comparison of grain size measurements in Al-Cu thin films: Imaging verses diffraction techniques
Abstract
No abstract available.
Related
K.P. Rodbell
Microelectronics Reliability
Kazuya Ohuchi, Christian Lavoie, et al.
IEDM 2007
J.M.E. Harper, K.P. Rodbell, et al.
Journal of Applied Physics