pFET V t control with HfO 2/TiN/poly-Si gate stack using a lateral oxygenation process
- B. Cartier
- M. Steen
- et al.
- 2009
- VLSI Technology 2009
Dr. Martin M. Frank is a Senior Research Scientist and Manager at IBM T.J. Watson Research Center in Yorktown Heights, NY. His research spans materials, device concepts, and system architectures for future CMOS logic, memory, and AI accelerators. This includes exploring functional oxides — high k dielectrics, ferroelectrics, resistive switching oxides, and semiconducting oxides — as well as semiconductors beyond silicon, and developing methods for their reliable integration into advanced device structures.
In 1996, Dr. Frank earned a Diplom degree in physics from Ruhr-Universität Bochum, Germany. In 2000, Dr. Frank received a Ph.D. degree in physics from Humboldt-Universität zu Berlin, for his research in surface science performed at Fritz-Haber-Institut der Max-Planck-Gesellschaft. After completing a postdoctoral appointment at Rutgers University, he joined IBM Research in 2003. From 2005 to 2006, he completed a research assignment at imec in Leuven, Belgium.
Dr. Frank serves on the Scientific Advisory Board of the Semiconductor Research Corporation (SRC) Joint University Microelectronics Program 2.0 (JUMP 2.0), on the IEEE Semiconductor Interface Specialists Conference (SISC) Technical Program Committee, and as a Nominator for the Japan Prize. He previously chaired the IEEE International Electron Devices Meeting (IEDM) subcommittee for Neuromorphic and Novel Computing and served on the IEEE Semiconductor Interface Specialists Conference (SISC) Executive Committee, the Scientific Advisory Boards of the Leibniz Institute for Crystal Growth (IKZ), the Advisory Board of the German Academic International Network (GAIN), and the Editorial Board of the Journal Materials. He has also chaired symposia at Materials Research Society (MRS) and European Materials Research Society (E-MRS) Spring Meetings. Dr. Frank has authored or co-authored more than 100 publications and has served as an editor of the book Thin Films on Silicon: Electronic and Photonic Applications. He has given more than 80 invited and contributed presentations and holds more than 100 U.S. patents.
In 2000, Dr. Frank was awarded the Otto Hahn Medal of the Max Planck Society. His contributions to the SRC and semiconductor ecosystem were recognized with 2022 and 2025 SRC Mahboob Khan Outstanding Liaison Awards. He also received two IBM Research Division Awards and two Outstanding Technical Achievement Awards for his contributions to high-k/metal gate, III-V, and ferroelectric technology, and has been recognized as an IBM Master Inventor.
Dr. Frank is a Senior Member of the Institute of Electrical and Electronics Engineers (IEEE) and a member of the Deutsche Physikalische Gesellschaft (German Physical Society, DPG) and the Society for Information Display (SID).
Comprehensive publication list: