Publications

2 results at Advanced Materials for Optics and Electronics

Polymeric silicon‐containing resist materials
- - R.D. Miller
  - G.M. Wallraff
- 1994
- Advanced Materials for Optics and Electronics
Laser cleaning: Laser‐induced removal of particles from surfaces
- - W. Zapka
  - Winfrid Ziemlich
  - et al.
- 1993
- Advanced Materials for Optics and Electronics

Polymeric silicon‐containing resist materials