Publications

2 results at Sensors and Actuators: A. Physical

Integrated multilayer high aspect ratio milliactuators
- - L.-S. Fan
  - S.J. Woodman
  - et al.
- 1995
- Sensors and Actuators: A. Physical
Tip-based data storage using micromechanical cantilevers
- - H.J. Mamin
  - L.-S. Fan
  - et al.
- 1995
- Sensors and Actuators: A. Physical