Publications

2 results at Materials Science and Engineering B: Solid-State Materials for Advanced Technology

Inductively coupled plasma etching of CoFeB, CoZr, CoSm and FeMn thin films in interhalogen mixtures
- - H. Cho
  - K.B. Jung
  - et al.
- 1999
- Materials Science and Engineering B: Solid-State Materials for Advanced Technology
Cl₂-based inductively coupled plasma etching of CoFeB, CoSm, CoZr and FeMn
- - K.B. Jung
  - H. Cho
  - et al.
- 1999
- Materials Science and Engineering B: Solid-State Materials for Advanced Technology