Publications

4 results at Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Dynamic response and shock resistance of ferromagnetic micromechanical magnetometers
- - Jeffrey K. Yee
  - Henry H. Yang
  - et al.
- 2002
- Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
SU-8 based piezoresistive mechanical sensor
- - J. Thaysen
  - A.D. Yalçinkaya
  - et al.
- 2002
- Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
Selective plating of nickel ceramic composite films for MEMS applications
- - K.S. Teh
  - Y.T. Cheng
  - et al.
- 2002
- Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
Integrated microheaters for in-situ flying-height control of sliders used in hard-disk drives
- - P. Mächtle
  - R. Berger
  - et al.
- 2001
- Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)