Publications

7 results at Journal of Microlithography, Microfabrication and Microsystems

Laser bandwidth and other sources of focus blur in lithography
- - Timothy Brunner
  - Daniel Corliss
  - et al.
- 2006
- Journal of Microlithography, Microfabrication and Microsystems
Water immersion of model photoresists: Interfacial influences on water concentration and surface morphology
- - Bryan D. Vogt
  - Christopher L. Soles
  - et al.
- 2005
- Journal of Microlithography, Microfabrication and Microsystems
Large-field particle beam optics for projection and proximity printing and for maskless lithography
- - Hans Loeschner
  - Gerhard Stengl
  - et al.
- 2003
- Journal of Microlithography, Microfabrication and Microsystems
Fabrication challenges for next-generation devices: Microelectromechanical systems for radio-frequency wireless communications
- - David Seeger
  - Jennifer Lund
  - et al.
- 2003
- Journal of Microlithography, Microfabrication and Microsystems
High numerical aperture lithographic imagery at the Brewster angle
- - Timothy A. Brunner
  - Nakgeuon Seong
  - et al.
- 2002
- Journal of Microlithography, Microfabrication and Microsystems
Linewidth variation characterization by spatial decomposition
- - Alfred K. Wong
  - Antoinette F. Molless
  - et al.
- 2002
- Journal of Microlithography, Microfabrication and Microsystems
Optimum mask and source patterns to print a given shape
- - Alan E. Rosenbluth
  - Rama N. Singh
  - et al.
- 2002
- Journal of Microlithography, Microfabrication and Microsystems