Publications

3 results at Radiation Physics and Chemistry

Several issues regarding the nanopore structure in low-dielectric-constant films detected by positron annihilation lifetime spectroscopy
- - C.L. Wang
  - M.H. Weber
  - et al.
- 2003
- Radiation Physics and Chemistry
The role of energy transfer on electron beam exposure of mixtures
- - J. Pacansky
  - R.J. Waltman
- 1985
- Radiation Physics and Chemistry
Polymer degradation in reactive ion etching and its possible application to all dry processes
- - H. Hiraoka
  - L.W. Welsh Jr.
- 1981
- Radiation Physics and Chemistry