Investigation of the effect of oxygen partial pressure during reactive sputtering of tantalum oxide resistive random access memory switching layer
- Rajas Mathkari
- Maximilian Liehr
- et al.
- 2025
- Materials Science in Semiconductor Processing
Publications
7 results at Materials Science in Semiconductor Processing
Observing the spontaneous formation of a sub-critical nucleus in a phase-change amorphous material from ab initio molecular dynamics
- Wen-Xiong Song
- Fausto Martelli
- et al.
- 2021
- Materials Science in Semiconductor Processing
Growth of nanostructures by locally modified surface reactivity
- A. Portavoce
- M. Kammler
- et al.
- 2009
- Materials Science in Semiconductor Processing
Synthesis and functionalization of epitaxial quantum dot nanostructures for nanoelectronic architectures
- R. Hull
- J. Floro
- et al.
- 2008
- Materials Science in Semiconductor Processing
Strain and lattice engineering for Ge FET devices
- S.W. Bedell
- A. Reznicek
- et al.
- 2006
- Materials Science in Semiconductor Processing
Preparation of SrRuO3 films for advanced CMOS metal gates
- K. Fröhlich
- K. Hušeková
- et al.
- 2004
- Materials Science in Semiconductor Processing
Texture of Cu and dilute binary Cu-alloy films: Impact of annealing and solute content
- K. Barmak
- A. Gungor
- et al.
- 2003
- Materials Science in Semiconductor Processing