Publications

3 results at ASMC 2010

Methodology for trench capacitor etch optimization using voltage contrast inspection and special processing
- - Oliver D. Patterson
  - Xing J. Zhou
  - et al.
- 2010
- ASMC 2010
Conference paper
Voltage contrast test structure for measurement of mask misalignment
- - Oliver D. Patterson
  - Roland Hahn
  - et al.
- 2010
- ASMC 2010
Conference paper
Characterization of contact module failure mechanisms for SOI technology using E-beam inspection and in-line TEM
- - Xing J. Zhou
  - Oliver D. Patterson
  - et al.
- 2010
- ASMC 2010
Conference paper