Thermal budget reduction and throughput enhancement for CMOS Epi stressors via wet clean interface contamination evaluation and control
- Paul Brabant
- Keith Chung
- et al.
- 2011
- ASMC 2011
Conference paper
Publications
6 results at ASMC 2011
Advanced overlay control in volume manufacturing
- Timothy Wiltshire
- Christopher Ausschnitt
- et al.
- 2011
- ASMC 2011
Conference paperAutomated SEM Offset using programmed defects
- Oliver D. Patterson
- Andrew Stamper
- et al.
- 2011
- ASMC 2011
Conference paperParasitics extraction, wideband modeling and sensitivity analysis of through-strata-via (TSV) in 3D integration/packaging
- Zheng Xu
- Xiaoxiong Gu
- et al.
- 2011
- ASMC 2011
Conference paperOptimization of pitch-split double patterning phoresist for applications at the 16nm node
- Steven J. Holmes
- Cherry Tang
- et al.
- 2011
- ASMC 2011
Conference paperStrategies for single patterning of contacts for 32nm and 28nm technology
- Bradley Morgenfeld
- Ian Stobert
- et al.
- 2011
- ASMC 2011
Conference paper