Publications

3 results at IITC 2013

CVD-Co/Cu(Mn) integration and reliability for 10 nm node
- - Takeshi Nogami
  - M. He
  - et al.
- 2013
- IITC 2013
Conference paper
Subtractive W contact and local interconnect co-integration (CLIC)
- - Fei Liu
  - Benjamin Fletcher
  - et al.
- 2013
- IITC 2013
Conference paper
UV cure impact on robust low-k with sub-nm pores and high carbon content for high performance Cu/low-k BEOL modules
- - N. Inoue
  - F. Ito
  - et al.
- 2013
- IITC 2013
Conference paper