Publications

2 results at OEN 2023

EUV sub-resolution assist feature impact: experimental and simulation evaluation
- - Zheng Chen
  - Martin Burkhardt
  - et al.
- 2023
- OEN 2023
Impact of high-NA half-field to full-field overlay performance by Monte Carlo simulations
- - Romain Lallement
  - Daniel Schmidt
  - et al.
- 2023
- OEN 2023