Advanced EUV Resist Characterization using Scatterometry and Machine Learning
- Daniel Schmidt
- Karen Petrillo
- et al.
- 2021
- ASMC 2021
Conference paper
Publications
5 results at ASMC 2021
Introduction to Analog Testing of Resistive Random Access Memory (RRAM) Devices towards Scalable Analog Compute Technology for Deep Learning
- Ruturaj Pujari
- Arthur Gasasira
- et al.
- 2021
- ASMC 2021
Conference paperA holistic characterization methodology for stochastic printing failures in EUV contact holes
- Jennifer Church
- Brad Austin
- et al.
- 2021
- ASMC 2021
Conference paperMissing Via Defect Capture Enhancement Using a Novel, High-Precision Array Segmentation Inspection Technique
- Graham Jensen
- Vidyasagar Anantha
- et al.
- 2021
- ASMC 2021
Conference paperCMP Defect Reduction and Mitigation: Practices and Future Trends
- Wei-Tsu Tseng
- Carol Boye
- et al.
- 2021
- ASMC 2021
Conference paper