Influence of alloying elements on the phase formation of ultrathin Ni (<10nm) on Si(001) substrates
- F.A. Geenen
- K. Van Stiphout
- et al.
- 2015
- IITC/MAM 2015
Publications
2 results at IITC/MAM 2015
Optimizing ULK film properties to enable BEOL integration with TDDB reliability
- E. T. Ryan
- Deepika Priyadarshini
- et al.
- 2015
- IITC/MAM 2015