Publications

2 results at PRiME/ECS Meeting 2016

Prospects of high-Ge-content strained SiGe for advanced FinFET generations
- - Pouya Hashemi
  - Karthik Balakrishnan
  - et al.
- 2016
- PRiME/ECS Meeting 2016
BEOL dielectric processing for Cu-Low k nano interconnect-impact of plasma CVD initial transient phenomena (ITP)
- - Son Van Nguyen
  - Hosadurga Shobha
  - et al.
- 2016
- PRiME/ECS Meeting 2016