CMP: Consideration of stop-on selectivity in advanced node semiconductor manufacturing technology
- Stan Tsai
- Hari Amanapu
- et al.
- 2017
- ECS Meeting 2017 - New Orleans
Publications
4 results at ECS Meeting 2017 - New Orleans
(Invited) bringing HI-Vs into CMOS: From materials to circuits
- Lukas Czornomaz
- Veeresh Deshpande
- et al.
- 2017
- ECS Meeting 2017 - New Orleans
Contacts in advanced CMOS: History and emerging challenges
- Christian Lavoie
- Praneet Adusumilli
- et al.
- 2017
- ECS Meeting 2017 - New Orleans
Low hydrogen silicon carbon nitride cap for high performance sub-10 nm Cu-low k interconnect
- Son Van Nguyen
- Shobha Hosadugra
- et al.
- 2017
- ECS Meeting 2017 - New Orleans