Publications

5 results at Symposium on Plasma Processing 1986

PLASMA POTENTIALS IN rf GLOW DISCHARGES.
- - J.W. Coburn
  - K. Koehler
- 1986
- Symposium on Plasma Processing 1986
ELECTRICAL CHARACTERIZATION OF SILICON SURFACES EXPOSED TO RIE.
- - C.M. Ransom
  - P. Spirito
- 1986
- Symposium on Plasma Processing 1986
PLASMA EFFECTS ON FILM PROPERTIES OF MAGNETRON SPUTTERED CARBON FILMS.
- - Michael A. Russak
  - S.M. Rossnagel
- 1986
- Symposium on Plasma Processing 1986
MODEL SYSTEMS IN THE STUDY OF ETCHING MECHANISMS.
- - F.R. McFeely
  - J.F. Morar
  - et al.
- 1986
- Symposium on Plasma Processing 1986
RADIAL DISTRIBUTION OF OXYGEN MOLECULAR IONS IN DIODE REACTOR.
- - Y.H. Lee
  - P.R. Brosious
- 1986
- Symposium on Plasma Processing 1986

PLASMA POTENTIALS IN rf GLOW DISCHARGES.