REACTIVE ION ETCHING OF MULTI-LAYER RESIST.
- H.Y. Ng
- D.P. Klaus
- et al.
- 1986
- MRS Fall Meeting 1986
Conference paper
Publications
3 results at MRS Fall Meeting 1986
REACTIVE ION ETCHING OF Al(Cu) ALLOYS.
- C.-K. Hu
- M.B. Small
- et al.
- 1986
- MRS Fall Meeting 1986
Conference paperPOST OXIDATION ANNEAL AND RE-OXIDATION EFFECTS IN 5 nm SiO//2 FILMS.
- L. Dori
- M. Arienzo
- et al.
- 1986
- MRS Fall Meeting 1986
Conference paper