Publications

3 results at SPE Regional Technical Conference 1988

Polysilanes: photochemistry and deep UV lithography
- - R.D. Miller
  - G.M. Wallraff
  - et al.
- 1988
- SPE Regional Technical Conference 1988
Novel photoresist design based on electrophilic aromatic substitution
- - B. Reck
  - R.D. Allen
  - et al.
- 1988
- SPE Regional Technical Conference 1988
Epoxy resins for deep UV lithography
- - K.J. Stewart
  - M. Hatzakis
  - et al.
- 1988
- SPE Regional Technical Conference 1988