Electromigration in VLSI metallization (Invited Paper)
- T. Kwok
- 1991
- SPIE Microelectronic Processing Integration 1991
Publications
5 results at SPIE Microelectronic Processing Integration 1991
KrF laser ablation of polyurethane
- Stephan Kueper
- James H. Brannon
- 1991
- SPIE Microelectronic Processing Integration 1991
Laser-formed structures to facilitate TAB bonding
- P.G. Ledermann
- Glen W. Johnson
- et al.
- 1991
- SPIE Microelectronic Processing Integration 1991
Laser-induced gold deposition for thin-film circuit repair (Invited Paper)
- T.H. Baum
- P.B. Comita
- et al.
- 1991
- SPIE Microelectronic Processing Integration 1991
Efficient laser cleaning of small particulates using pulsed laser irradiation synchronized with liquid-film deposition
- A.C. Tam
- W. Zapka
- et al.
- 1991
- SPIE Microelectronic Processing Integration 1991