Excimer laser as a source for thin Cu film deposition for use in electronic device fabrication
- A. Sugerman
- Bodil Braren
- et al.
- 1993
- SPIE OE/LASE 1993
Conference paper
Publications
7 results at SPIE OE/LASE 1993
Mechanisms of excimer laser ablation of strongly absorbing systems
- C.E. Otis
- Bodil Braren
- et al.
- 1993
- SPIE OE/LASE 1993
Conference paperGeneration of tunable, fcintosecond-tiinc-scale, vuv pulses by four-wave difference-frequency mixing in xenon
- J.H. Glownia
- D.R. Gnass
- et al.
- 1993
- SPIE OE/LASE 1993
Conference paperScanning capacitance detection and charge trapping in NOS
- B.D. Terris
- R.C. Barrett
- et al.
- 1993
- SPIE OE/LASE 1993
Conference paperPhase plates in the object plane for microlithography
- M. Levenson
- 1993
- SPIE OE/LASE 1993
Conference paperAssessment of polymeric materials for second-harmonic generation and optoelectronic applications
- D.M. Burland
- R.D. Miller
- et al.
- 1993
- SPIE OE/LASE 1993
Conference paperNonlinear optical properties of photorefractive polymers
- S.M. Silence
- F. Hache
- et al.
- 1993
- SPIE OE/LASE 1993
Conference paper