Directional sputter deposition for semiconductor applications
- S.M. Rossnagel
- 1994
- MRS Fall Meeting 1994
Conference paper
Publications
9 results at MRS Fall Meeting 1994
UV laser deposition of thin films at 248 NM for phase shifting mask repair
- Janos Farkas
- P.B. Comita
- et al.
- 1994
- MRS Fall Meeting 1994
Conference paperEffects of catalyst promoters on the growth of single-layer carbon nanotubes
- C.-H. Kiang
- William A.III. Goddard
- et al.
- 1994
- MRS Fall Meeting 1994
Conference paperRoughness analysis of Si1-xGex films
- R.M. Feenstra
- M.A. Lutz
- et al.
- 1994
- MRS Fall Meeting 1994
Conference paperElectrical characteristics of ultra-thin multi-layers of poly-Si and silicon dioxide
- K.K. Chan
- Y.H. Lee
- et al.
- 1994
- MRS Fall Meeting 1994
Conference paperGeometric and electronic structure of fullerene film growth as a function of coverage
- B. Reihl
- 1994
- MRS Fall Meeting 1994
Conference paperStudies on wear mechanism of ultrathin protective carbon overcoat by micro-wear scan technique
- T.W. Wu
- 1994
- MRS Fall Meeting 1994
Conference paperHigh-resolution x-ray diffraction measurements of SiGe/Si structures
- J.L. Jordan-Sweet
- P.M. Mooney
- et al.
- 1994
- MRS Fall Meeting 1994
Conference paperIn-situ x-ray diffraction and resistivity analysis of CoSi2 phase formation with and without a Ti interlayer at rapid thermal annealing rates
- C. Cabral Jr.
- L. Clevenger
- et al.
- 1994
- MRS Fall Meeting 1994
Conference paper