A novel dual-axial AFM cantilever with independent piezoresistive sensors for simultaneous detection of lateral and vertical forces
- Benjamin W. Chui
- Thomas W. Kenny
- et al.
- 1997
- IMECE 1997
Paper
Publications
3 results at IMECE 1997
A NOVEL DUAL-AXIAL AFM CANTILEVER WITH INDEPENDENT PIEZORESISTIVE SENSORS FOR SIMULTANEOUS DETECTION OF LATERAL AND VERTICAL FORCES
- Benjamin W. Chui
- Thomas W. Kenny
- et al.
- 1997
- IMECE 1997
Conference paperNanojoule thermal transfer in micromechanical heterostructures
- Rüdiger Berger
- Christoph Gerber
- et al.
- 1997
- IMECE 1997
Paper