Publications

2 results at BACUS Symposium on Photomask Technology and Management 1996

Low-cost mask for excimer laser projection ablation
- - James L. Speidell
  - Rajesh S. Patel
  - et al.
- 1996
- BACUS Symposium on Photomask Technology and Management 1996
Data-processing improvements for photomask pattern generators
- - James L. Speidell
  - Steven A. Cordes
  - et al.
- 1996
- BACUS Symposium on Photomask Technology and Management 1996