Publications

2 results at Microelectronic and MEMS Technologies 2001

Continuum model of shot noise and line edge roughness
- - G.M. Gallatin
- 2001
- Microelectronic and MEMS Technologies 2001
Simulation enabled decision making in advanced lithographic manufacturing
- - C. Progler
- 2001
- Microelectronic and MEMS Technologies 2001