Simulation enabled decision making in advanced lithographic manufacturing
- C. Progler
- 2001
- Microelectronic and MEMS Technologies 2001
Conference paper
Publications
2 results at Microelectronic and MEMS Technologies 2001
Continuum model of shot noise and line edge roughness
- G.M. Gallatin
- 2001
- Microelectronic and MEMS Technologies 2001
Conference paper