Publications

5 results at M&M 2006

Three-dimensional imaging of nano-voids in copper interconnects using incoherent bright field (IBF) tomography
- - P.A. Ercius
  - D.A. Muller
  - et al.
- 2006
- M&M 2006
Conference paper
High resolution EELS in the IBM sub-angstrom STEM
- - P.E. Batson
- 2006
- M&M 2006
Conference paper
Imaging at high beam energies in the scanning electron microscope
- - L. Gignac
  - S.H. Boettcher
  - et al.
- 2006
- M&M 2006
Conference paper
Si and Ge nanowire growth mechanisms observed using in situ microscopy
- - S. Kodambaka
  - J.B. Hannon
  - et al.
- 2006
- M&M 2006
Conference paper
The history and future of the SEM - A personal view
- - Oliver C. Wells
- 2006
- M&M 2006
Conference paper