Publications

4 results at SPIE Advanced Microelectronic Manufacturing 2003

Value-based management of design reuse
- - Juan Antonio Carballo
  - David L. Cohn
  - et al.
- 2003
- SPIE Advanced Microelectronic Manufacturing 2003
Applications of image diagnostics to metrology quality assurance and process control
- - John A. Allgair
  - Victor V. Boksha
  - et al.
- 2003
- SPIE Advanced Microelectronic Manufacturing 2003
Failure prediction across process window for robust OPC
- - Shumay D. Shang
  - Yuri Granik
  - et al.
- 2003
- SPIE Advanced Microelectronic Manufacturing 2003
Layout Optimization at the pinnacle of Optical Lithography
- - Lars Liebmann
  - Greg Northrop
  - et al.
- 2003
- SPIE Advanced Microelectronic Manufacturing 2003