Publications

2 results at AMC 2004

Integration of direct plating of Cu onto a CVD Ru liner
- - S. Malhotra
  - D. Canaperi
  - et al.
- 2004
- AMC 2004
Extendibility study of PVD Cu seedlayers in 90nm-groundrule lines and vias
- - A. Simon
  - S.B. Law
  - et al.
- 2004
- AMC 2004