Publications

2 results at International Conference on Characterization and Metrology for ULSI Technology 2005

Cross section and critical dimension metrology in dense high aspect ratio patterns with CD-SAXS
- - Ronald L. Jones
  - Eric K. Lin
  - et al.
- 2005
- International Conference on Characterization and Metrology for ULSI Technology 2005
High resolution profiling using ion scattering and resonant nuclear reactions
- - R.P. Pezzi
  - R.M. Wallace
  - et al.
- 2005
- International Conference on Characterization and Metrology for ULSI Technology 2005