Publications

3 results at TRANSDUCERS 2005

Monolithic CMOS multi-transducer gas sensor microsystem
- - Y. Li
  - C. Vancura
  - et al.
- 2005
- TRANSDUCERS 2005
Analysis and modeling of curvature in copper-based mems structures fabricated using CMOS interconnect technology
- - Marie-Ange Eyoum
  - Nils Hoivik
  - et al.
- 2005
- TRANSDUCERS 2005
A micromachined W-band iris filter
- - Firas Sammoura
  - Ying Cai
  - et al.
- 2005
- TRANSDUCERS 2005