Monolithic CMOS multi-transducer gas sensor microsystem
- Y. Li
- C. Vancura
- et al.
- 2005
- TRANSDUCERS 2005
Conference paper
Publications
3 results at TRANSDUCERS 2005
Analysis and modeling of curvature in copper-based mems structures fabricated using CMOS interconnect technology
- Marie-Ange Eyoum
- Nils Hoivik
- et al.
- 2005
- TRANSDUCERS 2005
Conference paperA micromachined W-band iris filter
- Firas Sammoura
- Ying Cai
- et al.
- 2005
- TRANSDUCERS 2005
Conference paper