Silicon layer stacking enabled by wafer bonding
- Chuan Seng Tan
- Kuan-Neng Chen
- et al.
- 2006
- MRS Fall Meeting 2006
Publications
5 results at MRS Fall Meeting 2006
CMOS-compatible through silicon vias for 3D process integration
- Cornelia K. Tsang
- Paul S. Andry
- et al.
- 2006
- MRS Fall Meeting 2006
In situ electron microscopy as a tool for imaging the growth of nanostructures
- S. Kodambaka
- F.M. Ross
- et al.
- 2006
- MRS Fall Meeting 2006
Directed self-assembly of thin block copolymer films under controlled atmosphere
- Sangcheol Kim
- R.M. Briber
- et al.
- 2006
- MRS Fall Meeting 2006
Power cycling effects on the structural stability of thermal pastes used in microelectronics
- Ijeoma Nnebe
- Claudius Feger
- et al.
- 2006
- MRS Fall Meeting 2006