Publications

3 results at IITC 1998

Copper dual damascene wiring for sub-0.25 μm CMOS technology
- - J. Heidenreich
  - D. Edelstein
  - et al.
- 1998
- IITC 1998
Conference paper
Spiral and solenoidal inductor structures on silicon using Cu-damascene interconnects
- - D. Edelstein
  - J.N. Burghartz
- 1998
- IITC 1998
Conference paper
Dielectric anti-reflection coating application in a 0.175 μm dual-damascene process
- - G.Y. Lee
  - Z.G. Lu
  - et al.
- 1998
- IITC 1998
Conference paper