Resist-based polarization monitoring for 193nm high-numerical aperture lithography
- Richard Tu
- Gregory McIntyre
- 2008
- Lithography Asia 2008
Publications
3593 results for Mathematical Sciences
On-chip timing uncertainty measurements on IBM microprocessors
- R.L. Franch
- P. Restle
- et al.
- 2008
- IEEE ITC 2008
Optimizing Models Based OPC fragmentation using genetic algorithms
- Domenico A. Dipaola
- Ian Mobert
- 2008
- SPIE Photomask Technology + EUV Lithography 2008
Wavefront generated by reflection of a plane wave from a conic section
- John A. Hoffnagle
- David L. Shealy
- 2008
- SPIE Optical Engineering + Applications 2008
Device-oriented directed self-assembly of lamella microdomains from a block copolymer containing hybrid
- Ho-Cheol Kim
- Joy Cheng
- et al.
- 2008
- SPIE Advanced Lithography 2008
Carbon nanotubes and optical confinement - Controlling light emission in nanophotonic devices
- Mathias Steiner
- Fengnian Xia
- et al.
- 2008
- SPIE Nanoscience + Engineering 2008
Strong photoluminescence at 1540 nm from Er-doped amorphous silicon oxycarbide: A novel silicon material for photonic applications
- Spyros Gallis
- Vasileios Nikas
- et al.
- 2008
- SPIE Nanoscience + Engineering 2008
A note on the continuous mixing set
- M. Zhao
- I.R. de Farias Jr.
- 2008
- Operations Research Letters
Compact optical modulator based on carrier induced gain of an InP/InGaAsP micro-disk cavity integrated on SOI
- Liu Liu
- Joris Van Campenhout
- et al.
- 2008
- Asia-Pacific Optical Communications 2008
Geometric approach to measure-based metric in image segmentation
- Vladimir Kluzner
- Gershon Wolansky
- et al.
- 2008
- Journal of Mathematical Imaging and Vision