32 NM Logic patterning options with immersion lithography
- K. Lai
- S. Burns
- et al.
- 2008
- SPIE Advanced Lithography 2008
Publications
3548 results for Mathematical Sciences
Measuring layer-specific depth-of-focus requirements
- Bernhard Liegl
- Allen Gabor
- et al.
- 2008
- SPIE Advanced Lithography 2008
Radiometric consistency in source specifications for lithography
- Alan E. Rosenbluth
- Jaione Tirapu Azpiroz
- et al.
- 2008
- SPIE Advanced Lithography 2008
Monitoring polarization at 193nm high-numerical aperture with phase shift masks: Experimental results and industrial outlook
- Gregory McIntyre
- Richard Tu
- 2008
- SPIE Advanced Lithography 2008
Integration of optical I/O with organic chip packages
- Bert J. Offrein
- Christoph Bergen
- et al.
- 2008
- SPIE Photonics Europe 2008
Location dependent heuristics for sensor coverage planning
- 2008
- Defense Transformation and Net-Centric System 2008
A biologically-inspired MANET architecture
- Aaron Kershenbaum
- Vasilieos Pappas
- et al.
- 2008
- Defense Transformation and Net-Centric System 2008
Controlling linewidth roughness in step and flash imprint lithography
- Gerard M. Schmid
- Niyaz Khusnatdinov
- et al.
- 2008
- EMLC 2008
Policy enabled interconnection of sensor networks using a message queue infrastructure
- Dinesh Chandra Verma
- Greg Cirincione
- et al.
- 2008
- Defense Transformation and Net-Centric System 2008
Addressing practical challenges in utility optimization of mobile wireless sensor networks
- Sharanya Eswaran
- Archan Misra
- et al.
- 2008
- SPIE Defense + Security 2008