Publications

3611 results for Mathematical Sciences

Graded spin-on organic bottom antireflective coating for high NA lithography
- - Dario L. Goldfarb
  - Sean D. Burns
  - et al.
- 2008
- SPIE Advanced Lithography 2008
Conference paper
Rise of chemical amplification resists from laboratory curiosity to paradigm enabling Moore's law
- - Hiroshi Ito
- 2008
- SPIE Advanced Lithography 2008
Conference paper
A new class of low bake resists for 193-nm immersion lithography
- - Ratnam Sooriyakumaran
  - Richard DiPietro
  - et al.
- 2008
- SPIE Advanced Lithography 2008
Conference paper
Resist freezing process for double exposure lithography
- - Kuang-Jung Rex Chen
  - Wu-Song Huang
  - et al.
- 2008
- SPIE Advanced Lithography 2008
Conference paper
The limitations of high index resists for 193nm hyper-NA lithography
- - Gregory McIntyre
  - Daniel Sanders
  - et al.
- 2008
- SPIE Advanced Lithography 2008
Conference paper
Lactones in 193 nm resists: What do they do?
- - Hiroshi Ito
  - Hoa D. Truong
  - et al.
- 2008
- SPIE Advanced Lithography 2008
Conference paper
Adaptive barrier update strategies for nonlinear interior methods
- - Jorge Nocedal
  - Andreas Wächter
  - et al.
- 2008
- SIAM Journal on Optimization
Paper
Resource constrained stream mining with classifier tree topologies
- - Brian Foo
  - Deepak S. Turaga
  - et al.
- 2008
- IEEE SPL
Paper
The halting probability via Wang tiles
- - Gregory Chaitin
- 2008
- Fundamenta Informaticae
Paper
Evaluation of 32nm Advanced immersion lithography pellicles
- - N. Zhou
  - K. Racette
  - et al.
- 2008
- SPIE Photomask Technology + EUV Lithography 2008
Conference paper