Microcavity III-V lasers monolithically grown on silicon
- Benedikt Mayer
- Svenja Mauthe
- et al.
- 2018
- SPIE OPTO 2018
Publications
14365 results for Physical Sciences
Channel Geometry Impact and Narrow Sheet Effect of Stacked Nanosheet
- Chun Wing Yeung
- Jingyun Zhang
- et al.
- 2018
- IEDM 2018
Electric field assisted placement of carbon nanotubes using sacrificial graphene electrodes
- M. Engel
- D.B. Farmer
- et al.
- 2018
- TechConnect 2018
Monolithically integrated InGaAs microdisk lasers on silicon using template-assisted selective epitaxy
- Svenja Mauthe
- Benedikt Mayer
- et al.
- 2018
- SPIE Photonics Europe 2018
The integration of 193i and DSA for BEOL metal cuts/blocks targeting sub-20nm tip-to-tip CD
- Chi-Chun Liu
- Yann Mignot
- et al.
- 2018
- SPIE Advanced Lithography 2018
Coater/developer based techniques to improve high-resolution EUV patterning defectivity
- Koichi Hontake
- Lior Huli
- et al.
- 2017
- SPIE Photomask Technology + EUV Lithography 2017
Overlay statistics for multiple exposure patterning
- 2017
- SPIE Advanced Lithography 2017
Air spacer for 10nm FinFET CMOS and beyond
- K. Cheng
- C. Park
- et al.
- 2016
- IEDM 2016
CMP Challenges for Advanced Technology Nodes
- John H Zhang
- Haigou Huang
- et al.
- 2017
- MRS Advances
The Study of Polyimide Film Properties and Adhesion Using a Surface Acoustic Wave Sensor
- D.W. Galipeau
- J.F. Vetelino
- et al.
- 2016
- Journal of Plastic Film & Sheeting